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NIKON METROLOGY
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iNEXIV VMA-2520
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NEXIV VMR-10080
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iNEXIV VMA-2520
High-speed, high-accuracy benchtop video measuring system with extended working distance
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Designed to meet demanding manufacturing requirements with automated measurements of mechanical parts, electronic devices, dies & molds and medical devices. The iNEXIV VMA-2520 is a new multi-sensor measuring system that's lightweight and compact enough to be used in the factory on the bench top, with fast, fully automatic and high accuracy features that make it ideally suited for a wide variety of industrial measuring, inspection and quality control applications. The iNEXIV is designed to measure 3D workpieces, is touch probe ready, integrates the latest imaging processing software and incorporates a new 10x optical zoom system and Laser Auto Focus option. |
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Key features
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Applications
- MEMS, microelectronics and optoelectronics
- Metal and plastic manufacturing
- Automotive manufacturing
- Medical Devices
- Surface Analysis, cracks & failure analysis
- Metallurgy
Functionalities
Easy and accurate measurements optimized for 3D parts
Nikon has drawn on its state-of-the-art digital technologies to produce a highly affordable automated measurement system. The iNEXIV VMA-2520's design is optimized for easy use as well as repeatable and accurate measurement of 3D parts.
Compact and lightweight
The iNEXIV VMA-2520 is a powerful bench-top system designed to use minimum factory floor space. The main body has a footprint of only 565 W x 690 D x 740mm H (computer and controller separate) and weighs only 72kg (158.7 lb), yet it still has a 250 x 200 x 200mm measuring capability.
Long working distance
The newly developed optical system features a super long 73.5mm working distance for all magnifications. This allows sufficient three dimensional clearance for Z-axis measurements even at high magnification.
VMA AutoMeasure software
Automeasure is Nikon's powerful measuring software platform. It provides various functions to easily conduct tasks ranging from setup, teaching programs and measurements, to evaluations.
High-speed, highly accurate laser AF (optional)
In addition to the standard Vision AF, an optional high-speed Laser AF with a long 63mm working distance is available. It provides fast focusing and Z-axis measurements regardless of the surface shape of your workpiece.
Touch probing measurement (optional)
The iNEXIV VMA-2520 accepts the Renishaw TP20 or TP 200 touch probe system, making surface and side coordinate measurement of complicated 3D parts possible, in areas that vision sensing hardware could not be used.
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NEXIV VMR-1515
Automated non-contact measuring NEXIV system(150x150mm stage).
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Designed to put the speed and accuracy of video measurement within everyone's reach. NEXIV VMR-1515 is an automated small-size CNC non-contact measuring instrument featuring TTL Laser height/profile scanning, intelligent pattern recognition and low contrast edge measuring. Geared for smaller parts, it features smaller travel (X, Y, Z) of 150 x 150 x 150mm. A low-cost entry model, the Performa, (without Laser AF and Outer LED Ring Illuminator) is available for video measurement applications. Request more information Key features
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- Ideal for semiconductor packages, substrates, stamped parts, connectors and small parts including clock parts.
- Performa model
Most economical model featuring 150x150mm travel and the same features as the standard VMR-1515 without laser AF & outer LED ring illuminator.
Applications
- MEMS, microelectronics and optoelectronics
- Metal and plastic manufacturing
- Automotive manufacturing
- Medical Devices
- Surface Analysis, cracks & failure analysis
- Metallurgy
Functionalities
Type 1,2,3 models
- 3 models (type: 1, 2, 3) with 5 step zoom magnification to cover different fields of view and resolution requirements
- 6x6" travel
- 150mm XY travel, and cast Mehanite stage with 150mm in Z direction
- A long 50mm working distance sufficiently supports measurements of 3D workpieces
- 15x zoom provides wide field of view for rapid search and high magnification for precise measurement. Accurate calibration at all magnifications allows rapid field of view measurements of multiple parameters.
- High-speed TTL laser AF ensures high-precision AF independent of surface shape (NEXIV VMR-1515 Performa models have only Vision AF, no Laser AF).
- Improved stage accuracy with new lower coefficient of expansion 0.1µm resolution scales.
- Ideal for Semiconductor packages, Substrates, Stamped parts, Connectors and small parts, Clock parts
Performa model
Performa is Nikon's most economical model. Features a 6 x 6 travel and has all the same features as the standard VMR-1515 without Laser AF & Outer LED ring illuminator.
Z120X model (with maximum magnification module)
- 120x optical magnification enables measurements of fine line widths
- High-precision TTL Laser AF features high NA and enables measurements of small height gaps
- Perfect for measurements of high-density, finely-machined workpieces
- Optional bird's-eye View software plots MEMS parts in 3D format
- Ideal for small high-density PCBs, small precision dies and molds, packages (2D + height), MEMS parts
LU model (universal epi-illuminator/motorized nose piece)
- Full range of Nikon CFI60 LU microscope objectives from 5X to 150X
- Supports brightfield, darkfield, DIC, simple polarizing applications
- Motorized quintuple universal nosepiece
- Easy to use software controls all functions of the system
- Ideal for small-size LCDs, organic EL panels, wafers up to 150mm
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NEXIV VMR-3020
The standard model of the NEXIV series (300x200mm stage).
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A high resolution lens system featuring large 300mm range and laser height measurements. An ideal general purpose 3D coordinate measuring system with 300 x 200 x 150mm stage travel, the NEXIV-3020 handles a variety of measurement tasks including those for mechanical parts, molded parts, stamped parts and various other workpieces. Features an 8-segment LED illumination system and through-the-lens laser auto-focus, allowing for ultra-accurate detection of measurement points. Comes in four models with 5 step zoom magnification to cover different fields of view and resolution requirements. Request more information Key features
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- Telecentric 15X zoom
Provides a wide field of view for rapid search and high magnification for accurate measurement. - Stage
High-precision and durable 300x200x150mm travel cast Mehanite stage. - Automeasure software
Features interactive teaching and measurment wizards, CAD interface, shape analysis and data management tools.
Applications
- MEMS, microelectronics and optoelectronics
- Metal and plastic manufacturing
- Automotive manufacturing
- Medical Devices
- Liquid crystal displays
- Surface Analysis, cracks & failure analysis
- Metallurgy
Functionalities
Type 1,2,3 models
- 3 models (type: 1, 2, 3) with 5-step zoom magnification to cover different fields of view and resolution requirements
- Long working distance (50mm) permits measurement of parts with large height variances
- 300 X, 200 Y mm travel, with cast Mehanite stage of 150mm Z
- Programmable dual white LED illuminator rings
- A variety of illumination choices facilitates accurate detection of edges in molded parts
- 15X zoom provides wide field of view for rapid search and high magnification for precise measurement. Accurate calibration at all magnifications allows rapid field of view measurements of multiple parameters
- Faster image acquisition and system speed with selected defect-free instrument grade progressive scan black & white CCD camera
- User-friendly and versatile VMR Automeasure software includes: CAD reader, offline programing, profiling software and programing wizards
- Laser AF enables cross-sectional shape and flatness evaluation as well as 3D profiling
- Improved stage accuracy with new lower coefficient of expansion 0.1µm resolution scales.
- Ideal for semiconductor packages, substrates, stamped parts, connectors, injection molded parts
- Superior performance for medical devices
- Optional Computer System B with the Cognex CX imaging card allows image rotation with pattern recognition for samples like Mulit-Lumen tubing (which can be oriented in any direction)
Z120X model (with maximum magnification module)
The NEXIV VMR-3020 maximum magnification module achieves measurements of finely machined workpieces. Perfect for measurements of topical MEMS parts, high-density PCBs and semiconductor packages.
- The combination of the maximum magnification module and high-precision stage enables accurate measurements of large geometry workpieces as well as minute structures
- Laser AF uses small spot size to provide accurate measurements of finer cross-sectional shapes and heights
- Optional surface analysis software displays 3D shapes of MEMS parts
LU model (universal epi-illuminator/motorized nosepiece)
- Full range of Nikon CFI60 LU microscope objectives from 5x to 150x
- Supports brightfield, darkfield, DIC, simple polarizing applications
- Motorized quintuple universal nosepiece
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NEXIV VMR-H3030
Ultra-high precision model achieves sub-micrometer level uncertainty (300x300x150mm stage)
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Nikon's highest precision automated video measuring system is the “Master Reference Measuring System” for your metrology lab. Nikon's highest precision automated vision system, the NEXIV VMR-H3030, has the best specifications, accuracy and repeatability of any NEXIV measuring system, with a minimum readout down to 0.01 µm. It features a 300 x 300 x 150mm stage, TTL Laser height/profile scanning, intelligent pattern recognition and low contrast edge measuring. Perfect when exceptional accuracy is critical, such as calibration of standards and gages, master dies and molds and difficult to measure or ultra-small precision parts. Request more information Key features
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- Stage
Durable 300x200x150mm travel cast Mehanite stage. - Automeasure software
Features interactive teaching and measurment wizards, CAD interface, shape analysis and data management tools.
Applications
- Automotive manufacturing
- Surface analysis
Functionalities
Nikon's most advanced optics
Ultrahigh precision of 0.01µm provides the critical detail necessary for a Master Calibration Instrument. The H3030 features a powerful telecentric 15:1 zoom module with 0.35 NA objective and 50mm free working distance.
Designed and constructed for ultra-high precision
Conceived and designed for the purpose of sub-micron precision measurement, the VMR-H3030 is massive (3x heavier than the equivalent VMR-3020). The stage is constructed of low coefficient of expansion metal with extra heavy duty roller bearing ways. Special high resolution linear encoder scales (with low coefficient of expansion glass scales) provide read-outs that are 10X finer than our other Nexiv Measuring Systems.
Through-the-lens (TTL) laser focusing system
Allows users to fully utilize the powerful optics to scan at 1,000 points per second on complex profiles of 3D precision parts and a 15X Telecentric Zoom System that facilitates easy searches at low magnifications.
Unsurpassed edge detection
Black and gray portions of a workpiece are digitally classified into 256 levels, then edges are detected and processed based on this classification. This prevents measurement data from being affected by changes in illumination.
When the operator clicks the point to be measured, the system automatically rotates the probes, sets them at the optimum position, and sets the probe size automatically. Desired edges are easily selected by eliminating dust and burrs through a change in the contrast threshold level. Unique algorithms enhance edge detection, even at low magnifications.
Multiple illumination choices
A variety of illumination choices facilitate accurate edge detection in dies and molds. These include:
- Two LED ring illuminators (8-sector illumination system consisting of inner and outer ring illuminators for observation of extremely low-contrast edges that are usually invisible under episcopic illumination)
- Episcopic illumination (top light)
- Diascopic illumination (bottom light - Edges previously difficult to capture can be detected with high resolution
Automeasure software
Features interactive measurement wizards, which can be customized by each operator for future use. Intelligent search functions eliminate possible measurement errors and a multi-pattern search function automatically corrects part-to-part variation along with deviations in expected edge or feature locations. NEXIV also features a pattern matching measurement system that determines coordinate values for features too difficult to measure in the normal geometric measuring mode.
Rugged steel bases
For superior stability in any environment with stage rail designs normally seen on high-end machine tools.
VMR-Z120X maximum magnification model
Offers even greater precision, providing optical magnification to 120X. Ideal for wafer-level CSP, wafer bump height and SIP, rerouted masks and masks for MEMS.
Other features:
- High precision stage facilitates accurate measurements for even wider dimensions
- Enables measurements of top and bottom widths of etched lines
- Laser AF facilitates measurements of minuscule bump heights
- Enables evaluation of cross-sectional shapes of bumps and solder balls
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NEXIV VMR-6555
Mid-sized stage model engineered for high speed measurements (650x550mm stage).
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Large stage bridge optimal for measurements of PCB patterns and external dimensions of a display panel. The NEXIV VMR-6555 is a large stage bridge automated CNC non-contact measuring instrument. It features TTL laser height/profile scanning, intelligent pattern recognition and low contrast edge measuring. Designed for larger samples like FDP, LCD, PCB and mass-in-line inspections. Four models available with stepped zoom magnification ranges to cover different fields of view and resolution requirements. Request more information Key features
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- Telecentric 15X zoom
The VMR-6555 has a powerful telecentric 15:1 zoom module with 0.35 N.A. objective and 50mm free working distance. - Stage
The high-precision and durable 650x550mm cast Mehanite stage is perfect for PCB and display panel measurements. - Automeasure software
Features interactive teaching and measurment wizards, CAD interface, shape analysis and data management tools.
Applications
- MEMS, microelectronics and optoelectronics
- Metal and plastic manufacturing
- Automotive manufacturing
- Medical Devices
- Liquid crystal displays
- Surface Analysis, cracks & failure analysis
- Metallurgy
- MEMS, Metal Manufacturing, Plastic Manufacturing, Automotive Manufacturing, Medical Devices, Microelectronics, Optoelectronics, Surface Analysis, Liquid Crystal Displays, Cracks & Failure Analysis, Metallurgy
Functionalities
Type 1,2,3 models
- 650 x 550 mm stage stroke perfect for PCBs
- Automatic measurement of batches of parts by placing multiple pieces together on the stage
- Laser AF achieves high-accuracy measurements of bump heights
- Laser AF also enables measurements of height variance and warping in workpieces
- Search function enables measurements of lands and holes of PCBs
- Search function provides accurate measurements even when workpieces are not properly located on the stage
- Variety of illumination choices facilitate accurate edge detection even for vague geometries
- High-speed stage and image processing provide higher accuracy and throughput
- Faster image acquisition and system speed with selected defect-free instrument grade progressive scan black & white CCD
- Easy to program, versatile VMR Automeasure software includes: CAD reader, offline programing, profiling software and programming wizards
- Ideal for semiconductor packages (multiple pieces), substrates, printing masks for substrates, stamped parts (multiple pieces), connectors (multiple pieces), injection molded parts (multiple pieces
Z120X maximum mag models
Amazing 120x zoom combined with a big stage enables ultra-high magnification measurements on big workpieces. Ideal for measuring high-density PCBs and their masks.
- 120X zoom
- Measurements of 1µm line widths are possible at the maximum magnification
- Laser AF perfect for measuring small, complicated geometries
- High-speed stage and image processing provide higher throughput
- Perfect for high-density PCBs, exposure masks for substrate, semiconductor packages (multiple pieces; 2D + height), photo plotter machines for masks, probe cards
- Full range of Nikon CFI60 LU microscope objectives from 5X to 150X
- Supports brightfield, darkfield, DIC, simple polarizing applications
- Motorized quintuple universal nosepiece
- Easy to use software controls all functions of the system
- Perfect for FPD panels (up to 22")
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NEXIV VMR-10080
1000x800mm stage stroke model geared for large-size workpieces.
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Ultra-long stage stroke provides maximum performance in the measurement of large-size workpieces such as FPD devices. Geared for ultra-wide measuring applications, the NEXIV VMR-10080 can handle large flat panels, shadow masks, etching sheets for lead frames, LCDs, mask patterns, and other large workpieces. Among its many features is a 1000x800x150mm stage stroke, bright diascopic illumination, pinpoint laser autofocusing, and advanced search functions. An ultra-high magnification model is also available. Request more information |
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Key features
- Laser autofocus
Enables measurements of height variance and warping in workpieces. - Large stage
The 1000x800mm stage travel handles large flat panels, shadow masks, etching sheets for lead frames, LCDs, mask patterns, and other large workpieces. - Automeasure software
Features interactive teaching and measurment wizards, CAD interface, shape analysis and data management tools.
Applications
- Surface analysis
- Liquid crystal displays
Functionalities
Type 1,2,3 models
- Its 1000x800mm stage travel is more than adequate to handle large flat panels, shadow masks, etching sheets for lead frames, LCDs, mask patterns, and other large work-pieces; 150mm Z-axis stroke; bright diascopic illumination.
- 3 models (type: 1, 2, 3) with 5-step zoom magnification to cover different fields of view and resolution requirements
- Laser AF also enables measurements of height variance and warping in workpieces
- Search function facilitates measurements of lands and holes of PCBs
- Variety of illumination choices facilitate accurate edge detection even for vague geometries
- High-speed stage and high-speed image processing provide high throughput
Z120X maximum mag models
- Achieves ultra-high magnification measurements with a long 1000x800mm stage stroke. Ideal for measuring minute line widths of large-size display panels.
- Automatic measurements of batches of small parts
- Laser AF achieves high-accuracy measurements of bump heights
- Laser AF enables measurements of height variance and warping in workpieces
- Search function enables measurements of lands and holes of PCBs
- Search function also provides accurate measurements even when workpieces are not located properly on the stage
- Variety of illumination choices facilitate accurate edge detection even for weak edges
- High-speed stage and image processing provide higher throughput
- Ideal for LCD glass substrates (pattern measurements) and organic EL glass substrates (pattern measurements)
LU model (universal epi-illuminator/motorized nosepiece)
- Full range of Nikon CFI60 LU microscope objectives from 5X to 150X
- Supports brightfield, darkfield, DIC, simple polarizing applications
- Motorized quintuple universal nosepiece
- Easy to use software controls all functions of the system
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NEXIV VMR-12072
47-inch display device measurement platform with ultra-long 1200x720mm stage.
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Largest stage stroke provides maximum size, speed and performance in the measurement of very large-size workpieces such as FPD devices. The largest of the NEXIV Non-contact automated measuring instruments, the VMR-12072 can handle large flat panels, shadow masks, etching sheets for lead frames, LCDs, mask patterns, and other extra large workpieces. Among its many features is a 1200x720x150mm stroke, bright diascopic illumination, pinpoint laser autofocusing, and advanced search functions. An ultra-high magnification model is also available. Request more information |
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Key features
- Ultra-long stage
- Pinpoint laser autofocusing
- Advanced search functions
Applications
- Surface analysis
- Liquid crystal displays
Functionalities
Type 1,2,3 models
- 1200x720mm stage travel is more than adequate to handle large flat panels, shadow masks, etching sheets for lead frames, LCDs, mask patterns, and other large work-pieces; 150mm Z-axis stroke; bright diascopic illumination
- 3 models (type: 1, 2, 3) with 5-step zoom magnification to cover different fields of view and resolution requirements
- Laser AF also enables measurements of height variance and warping in workpieces
- Search function facilitates measurements of lands and holes of PCBs
- Variety of illumination choices facilitate accurate edge detection even for vague geometries
- High-speed stage and high-speed image processing provide high throughput
Z120X model (maximum magnification module)
- Achieves ultra-high magnification measurements with a long 1200x720mm stage stroke. Ideal for measuring minute line widths of large-size display panels.
- Automatic measurements of batches of small parts
- Laser AF achieves high-accuracy measurements of bump heights Laser AF enables measurements of height variance and warping in workpieces
- Search function enables measurements of lands and holes of PCBs
- Search function also provides accurate measurements even when workpieces are not located properly on the stage
- Variety of illumination choices facilitate accurate edge detection even for weak edges
- High-speed stage and image processing provide higher throughput
- Ideal for LCD glass substrates (pattern measurements) and organic EL glass substrates (pattern measurements)
LU model (universal epi-illuminator/motorized nosepiece)
- Full range of Nikon CFI60 LU microscope objectives from 5X to 150X
- Supports brightfield, darkfield, DIC, simple polarizing applications
- Motorized quintuple universal nosepiece
- Easy to use software controls all functions of the system
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NEXIV FOUP
Non-contact, fully automated wafer carrier measuring system.
Provides all dimensional measurements required for wafer carrier fabrication including control of deformation due to aging of wafer carriers.
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The NEXIV VMR-C4540 - designed for use with 300mm Front Opening Unified Pod (FOUP) & Front Opening Shipping Box (FOSB) wafer carriers - detects hard to see edges using a variety of illumination features as well as Nikon's unique image processing technologies. By incorporating laser AF that provides quick non-contact focusing, even on transparent surfaces and on the edge of the peripheries of the wafer, the VMR-C4540 is able to measure SEMI-standard dimensions with excellent accuracy. Request more information Key features
Applications
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NEXIV confocal
Ideal for measuring micro-dimensional 2D and 3D workpieces such as FPD devices.
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Nikon's Confocal NEXIV delivers a new dimension in IC metrology. Nikon's Confocal NEXIV VMR-K3040ZC addresses the metrology needs of complex IC packages resulting from the enormous demand for reliable semiconductor products. The Confocal NEXIV features a new optical measuring head using confocal capabilities to solve the problem of Z-series measurement. This head supports a micron-level measuring capability, and has been optimized for semiconductor measuring by stressing low distortion to optimize the entirefield of view. Request more information Key features
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- Telecentric 15X zoom
The NEXIV Confocal has a powerful telecentric 15:1 zoom module with 0.35 N.A. objective and 50mm free working distance - Stage
The 300x400mm stage is perfect for bump heights on advanced IC packages, MEMs, probe cards, micro lenses, photoo spacers for color FPD panels, molds and others. - Confocal optics
Deliver superior images for improved repeatability and accuracy.
Applications
- MEMS
- Liquid Crystal Displays
Functionalities
Confocal objective lenses
Confocal Objective Lenses: 1.5x - W.D. 24mm, 3x - W.D. 24mm, 7.5x - W.D. 24mm
Advanced image processing
Advanced image processing enhances contrast and fidelity with powerful edge detection to ensure accuracy and repeatability.
Height measurement
Fast, confocal high precision height measurement 0.35 at 2 sigma in 1.5 second cycle time.
AutoMeasure software
New, easy-to-program, versatile VMR Automeasure software includes CAD reader, offline programming, profiling software and programming wizards.
Defect-free progressive B/W CCD
Faster image acquisition and system speed with selected defect-free instrument grade progressive scan black and white CCD camera.
Ideal applications
Ideal for measuring micro-dimensional 2D and 3D workpieces, all requiring exceptionally high accuracy. Examples include bump heights on advanced IC packages, MEMS, probe card, micro lens, contact lenses, photo spacers for color FPD panel, molds and others.
Confocal technology advantages
Widely used in bio-science research, confocal microscopy offers several advantages over conventional optical microscopy, including controllable depth of field, the elimination of image degrading out-of-focus information, and the ability to collect serial optical sections from material samples. The key to the confocal approach is the use of spatial filtering to eliminate flare in material sample images. The Nikon Confocal NEXIV uses a Nipkow disk, which features multiple, symmetrically placed spirals of pinhole apertures through which light is passed and split into mini-beams. As the disk rotates, each beam scans across a portion of the sample field and generates a 3D image. The image is projected into a digital CCD camera using optical sectioning technology. The result is a 3D image captured in one scan delivering highly accurate and reliable height measurement data.
Advanced optics
Advanced Nikon optics provide superior images for improved repeatability and accuracy.
Telecentric zoom
5-step 15x telecentric zoom (15:1) magnification to cover different fields of view and resolution requirements.
300x400x500mm stage
Fast, accurate and durable - 300 X, 400Y mm travel with cast Mehanite stage with 150mm Z.
Improved stage accuracy
Improved stage accuracy with new lower coefficient of expansion 0.1µm resolution scales.
Large diameter ball screw
Precision ground large diameter ballscrew with DC servo motors for high speed and stiffness.
TTL laser autofocus
Vision and TTL laser autofocus. High speed through-the-lens laser scans 1000 points/sec. with 0.5µm Z accuracy at 2 sigma.
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